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POCO Electron Beam Crucibles & Hearth Shields (Carbon Graphite)

Alfa Aesar is proud to offer a range of POCO Electron Beam Crucibles and Hearth Shields

The POCO graphite electron beam evaporation crucibles are designed to offer E-Beam users improved evaporation performance over that obtainable in bare hearth mode. Our graphite crucible acts as an “energy efficient” thermal barrier between the molten evaporant and the water cooled copper hearth.

This will allow an increased deposition rate of up to 400% with the same power, or the same deposition using only 25% of the power, when compared to evaporation from a bare hearth. In some applications, the high power required to achieve an economical deposition rate can emit a form of radiation that can damage the devices on the wafers. POCO’s crucible can allow a much lower power setting while maintaining an acceptable deposition rate.

POCO Electron Beam Evaporation Crucibles exhibit long life due to the unique microstructure and high strength of the material.

Other properties include:

  • ultrafine-grain
  • isotropic microstructure
  • high density
  • strong polycrystalline material
  • inter-connecting porosity
  • purified to below 5 ppm
POCO Hearth Shields

Designed for use with POCO's Electronic Beam Crucibles, POCO Hearth Shields give users three important field-tested and proven advantages.

  1. Acting as a physical barrier, the hearth shield eliminates bonding of the evaporant with those areas of the hearth it covers. This reduces downtime for cleaning.
  2. With less cleaning necessary, the risk of damage to the hearth from both cleaning and handling is greatly reduced. This provides longer hearth life.
  3. Less cleaning, less handling damage, less downtime all add up to lowered maintenance costs to the user. More productive time is gained for each hearth.

When used in conjunction with the matching POCO Crucible, the shield is designed to avoid contact with the crucible to minimize the possibility of their welding together. Best results are obtained when both shield and crucible are used together.


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